Development of Ni-Mn-Ga Enabled Micropumps for Hybrid Microdevices in Microelectromechanical Systems

Abstract

This study selects a single crystalline Ni-Mn-Ga alloy by its exceptional actuator attributes, high actuation speed, precise position control, rapid response to external magnetic fields, and extended operational lifespan. Researchers venture into uncharted territory, aiming to harness the potential of Ni-Mn-Ga alloy to revolutionize micropump performance and refine fluid manipulation within miniature devices. The methodology at the heart of this endeavor involves the seamless integration of this specialized alloy with microdevice technology, giving rise to a set of unique pump components that substantially boost pump efficiency. Crucially, Ni-Mn-Ga is the chosen material for the active part of the micropump. At the same time, MEMS fabrication handles the passive elements, all facilitated by the 0.18 µm semiconductor technology and Sivalco TCAD simulation software. Computational simulations validate the alloy's suitability, impressively achieving an accumulated flow volume of 0.15 x 10e-4 µL in 10 microseconds. Beyond its scientific significance, this research bridges MEMS technology and magnetic-enabled smart materials, showcasing the remarkable capabilities of Ni-Mn-Ga alloy in significantly enhancing micropump performance. These innovative solutions promise to open doors to groundbreaking applications in microfluidic systems across many scientific and industrial domains.