R. R. Bebitov, O. A. Abdulkhaev, D. M. Yodgorova, D. B. Istamov, Sh. M. Kuliyev, A. A. Khakimov, A. B. Bobonazarov, A. Z. Rakhmatov
{"title":"Distribution of impurities in base-depleted region of diode temperature sensor","authors":"R. R. Bebitov, O. A. Abdulkhaev, D. M. Yodgorova, D. B. Istamov, Sh. M. Kuliyev, A. A. Khakimov, A. B. Bobonazarov, A. Z. Rakhmatov","doi":"10.1063/10.0025635","DOIUrl":null,"url":null,"abstract":"The performance of diode temperature sensors depends on their base-depleted region thickness and impurity distribution profile. In this article, we study the boron diffusion process in the thin base region with a thickness of about 1 μm. We show that, for the proposed p+–n–p temperature sensor structure, the impurity distribution in the n region has the form of an asymmetric parabola, with an extreme concentration point shifted towards the “upper” p+ region.","PeriodicalId":0,"journal":{"name":"","volume":"34 9","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.1063/10.0025635","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The performance of diode temperature sensors depends on their base-depleted region thickness and impurity distribution profile. In this article, we study the boron diffusion process in the thin base region with a thickness of about 1 μm. We show that, for the proposed p+–n–p temperature sensor structure, the impurity distribution in the n region has the form of an asymmetric parabola, with an extreme concentration point shifted towards the “upper” p+ region.
分享
京公网安备 11010802042870号
京ICP备2023020795号-1
求助内容：
应助结果提醒方式：
扫码关注我们
