D. E. Melezhenko, D. V. Lopaev, Yu. A. Mankelevich, S. A. Khlebnikov, A. A. Solovykh, L. S. Novikov, E. N. Voronina
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引用次数: 0
Abstract
The effect of nitrogen and oxygen plasma on quasi-two-dimensional MoS2 films is studied experimentally and theoretically in order to identify the main mechanisms of surface functionalization and the influence on the structure and on the properties of the films. Diagnostics of samples before and after treatment using radicals and ions is carried out ex situ using Raman spectroscopy, spectroscopic ellipsometry, X‑ray photoelectron spectroscopy, etc. It is shown that the effect of the nitrogen and oxygen plasma on ultrathin MoS2 films results in modifying the near-surface layers of the samples due to removal of sulfur and incorporation of incident atoms into the resulting vacancies. The simulation of density functional theory is applied to reveal the main mechanisms of surface functionalization in MoS2 monolayers and to explain the experimental results.
期刊介绍：
Inorganic Materials: Applied Research contains translations of research articles devoted to applied aspects of inorganic materials. Best articles are selected from four Russian periodicals: Materialovedenie, Perspektivnye Materialy, Fizika i Khimiya Obrabotki Materialov, and Voprosy Materialovedeniya and translated into English. The journal reports recent achievements in materials science: physical and chemical bases of materials science; effects of synergism in composite materials; computer simulations; creation of new materials (including carbon-based materials and ceramics, semiconductors, superconductors, composite materials, polymers, materials for nuclear engineering, materials for aircraft and space engineering, materials for quantum electronics, materials for electronics and optoelectronics, materials for nuclear and thermonuclear power engineering, radiation-hardened materials, materials for use in medicine, etc.); analytical techniques; structure–property relationships; nanostructures and nanotechnologies; advanced technologies; use of hydrogen in structural materials; and economic and environmental issues. The journal also considers engineering issues of materials processing with plasma, high-gradient crystallization, laser technology, and ultrasonic technology. Currently the journal does not accept direct submissions, but submissions to one of the source journals is possible.
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