{"title":"A new electrostatic tunable capacitor for wide ranges of applications","authors":"Davoud Razaghpour, Mir Majid Ghasemi, Amir Fathi","doi":"10.1007/s00542-024-05701-3","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":18544,"journal":{"name":"Microsystem Technologies","volume":"84 23","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-06-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Microsystem Technologies","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1007/s00542-024-05701-3","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}