F. F. Komarov, O. V. Mil’chanin, I. N. Parchomenko, P. V. Kuchinskii, A. E. Al’zhanova, M. A. Mokhovikov, E. Wendler
{"title":"Influence of the Laser Pulse Annealing of the Silicon Implanted with Indium and Arsenic Ions on its Optical and Structural Properties","authors":"F. F. Komarov, O. V. Mil’chanin, I. N. Parchomenko, P. V. Kuchinskii, A. E. Al’zhanova, M. A. Mokhovikov, E. Wendler","doi":"10.1007/s10891-024-02946-7","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":0,"journal":{"name":"","volume":"20 4","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-06-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1007/s10891-024-02946-7","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}