Planar and Ridged Waveguide Preparation on Erbium Pre-implanted Fused Silica by Multi-energy Helium Ion Implantation and Femtosecond Laser Ablation
Jinhua Zhao, Li Fan, Boyang Li, Wenzhuo Zang, Aijia liu, Jinhua Mao, Yu Yue, Shuang Li, Yicun Yao, Qing-Yang Yue
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