Bingxue Han, Zhijun Wang, Lijia Chen, Bin Wu, Chongyang Chen, Benshuang Sun
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引用次数: 0
Abstract
Zinc-doped indium oxide (IZO) thin films were deposited on silicon dioxide substrates by radio-frequency magnetron sputtering using an IZO ceramic target with In2O3/ZnO weight ratio of 9:1. The effects of power, pressure, and distance between target and substrate on microstructure and photoelectric properties of IZO films were investigated. The results show the performance of IZO films prepared under the conditions of power 80 W, air pressure .5 Pa, and target base distance 80 mm are the best, and the IZO films are amorphous with high transmittance (>86.0%), high mobility (>45.0 cm2/V s), and low resistivity (less than 2.0 × 10−4 Ω cm), which are the best photoelectric performance reported at present. This work provides a feasible research approach for preparing high-performance IZO thin films.
期刊介绍：
The International Journal of Applied Ceramic Technology publishes cutting edge applied research and development work focused on commercialization of engineered ceramics, products and processes. The publication also explores the barriers to commercialization, design and testing, environmental health issues, international standardization activities, databases, and cost models. Designed to get high quality information to end-users quickly, the peer process is led by an editorial board of experts from industry, government, and universities. Each issue focuses on a high-interest, high-impact topic plus includes a range of papers detailing applications of ceramics. Papers on all aspects of applied ceramics are welcome including those in the following areas:
Nanotechnology applications;
Ceramic Armor;
Ceramic and Technology for Energy Applications (e.g., Fuel Cells, Batteries, Solar, Thermoelectric, and HT Superconductors);
Ceramic Matrix Composites;
Functional Materials;
Thermal and Environmental Barrier Coatings;
Bioceramic Applications;
Green Manufacturing;
Ceramic Processing;
Glass Technology;
Fiber optics;
Ceramics in Environmental Applications;
Ceramics in Electronic, Photonic and Magnetic Applications;
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