Design optimization and experimental verification of ultrasonic stack for micro hot embossing of polymers

Abstract

Ultrasonic micro hot embossing (UMHE) is a prominent technique used in numerous sectors to produce micro parts since it is cheaper, faster, and more accurate. Amplitude uniformity is a crucial parameter in UMHE in order to manufacture micro parts with accurate dimensions and high-quality surfaces, even though limited research has been conducted on the uniformity of ultrasonic amplitude at the horn face during the embossing process. This paper presents an experimental and numerical study for designing an ultrasonic transducer and horn tailored to the micro hot embossing of polymer micro parts. A finite element (FE) simulation model combined with the Taguchi method has been developed to optimize the horn geometry and maximum amplitude uniformity. The Taguchi orthogonal array of 25 design runs has been generated and simulated using the developed FE modal analysis model, and then the optimized geometry was used to fabricate the horn. Applied torque and operating time calibrate and evaluate the transducer vibration characteristics. Experimental and simulation results revealed that the fabricated ultrasonic transducer and horn of a straight microfeature has a natural frequency of 28.8 kHz and has an 11 µm average peak-to-peak amplitude with 0.963 amplitude homogeneity along the microfeature face. The achieved frequency separation was greater than 0.85 kHz, whereas the gain ratio was 1.2. The design methodology developed in this paper showed great potential and has been numerically validated for various microfeature shapes across the horn face. Consequently, it can be applied to various ultrasonic applications beyond UMHE.