Jian Liu, yong jiang, Ziyi Wang, Chongliang Zou, Chenguang Liu
{"title":"Depth localization of subsurface defects by optical dark-field confocal microscopy","authors":"Jian Liu, yong jiang, Ziyi Wang, Chongliang Zou, Chenguang Liu","doi":"10.1088/1361-6501/ad5dde","DOIUrl":null,"url":null,"abstract":"\n Subsurface defects (SSD) in optical components pose a significant challenge for enhancing the power density of high-energy laser devices. This study investigated the issue of systematic deviation between the measured and actual depths of subsurface defects when employing optical dark-field confocal microscopy for three-dimensional measurements, which is attributed to refractive index disparities between the sample and the observation environment. This paper introduces geometric and diffraction optical models for correcting errors in the subsurface defect depth, along with a calculation method for determining the correction coefficient. By comparing the experimental data and model simulations, a linear relationship between the measured and actual depths was identified with linearity errors below 2.5% and a minimum of 0.67%. The correction coefficients derived from the optical diffraction model are in good agreement with those obtained experimentally. These findings offer valuable insights for calculating subsurface defect depth correction coefficients across various scenarios and requirements to ensure precise measurements.","PeriodicalId":18526,"journal":{"name":"Measurement Science and Technology","volume":null,"pages":null},"PeriodicalIF":2.7000,"publicationDate":"2024-07-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Measurement Science and Technology","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1088/1361-6501/ad5dde","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ENGINEERING, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 0
Abstract
Subsurface defects (SSD) in optical components pose a significant challenge for enhancing the power density of high-energy laser devices. This study investigated the issue of systematic deviation between the measured and actual depths of subsurface defects when employing optical dark-field confocal microscopy for three-dimensional measurements, which is attributed to refractive index disparities between the sample and the observation environment. This paper introduces geometric and diffraction optical models for correcting errors in the subsurface defect depth, along with a calculation method for determining the correction coefficient. By comparing the experimental data and model simulations, a linear relationship between the measured and actual depths was identified with linearity errors below 2.5% and a minimum of 0.67%. The correction coefficients derived from the optical diffraction model are in good agreement with those obtained experimentally. These findings offer valuable insights for calculating subsurface defect depth correction coefficients across various scenarios and requirements to ensure precise measurements.
期刊介绍:
Measurement Science and Technology publishes articles on new measurement techniques and associated instrumentation. Papers that describe experiments must represent an advance in measurement science or measurement technique rather than the application of established experimental technique. Bearing in mind the multidisciplinary nature of the journal, authors must provide an introduction to their work that makes clear the novelty, significance, broader relevance of their work in a measurement context and relevance to the readership of Measurement Science and Technology. All submitted articles should contain consideration of the uncertainty, precision and/or accuracy of the measurements presented.
Subject coverage includes the theory, practice and application of measurement in physics, chemistry, engineering and the environmental and life sciences from inception to commercial exploitation. Publications in the journal should emphasize the novelty of reported methods, characterize them and demonstrate their performance using examples or applications.