Elastic Energy Relaxation in the Chemical Reaction of CO with Single-Crystalline Silicon during Coordinated Substitution of Atoms

IF 1.8 3区 化学 Q3 CHEMISTRY, INORGANIC & NUCLEAR Russian Journal of Inorganic Chemistry Pub Date : 2024-07-17 DOI:10.1134/s0036023623603227
S. A. Kukushkin, A. V. Osipov
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Abstract

This study provides a detailed microscopic description of the chemical transformation of a silicon crystal into a silicon carbide crystal via reaction with carbon monoxide gas at the Si(111) surface. This was done using density functional theory in the spin-polarized PBE approximation. All intermediate (adsorption) states and the single transition state were identified using the NEB method. It was shown that the transition state is an Si–O–C triangle with bond lengths of 1.94, 1.24, and 2.29 Å. Additionally, the energy profile of this chemical reaction was calculated. The presence of dangling bonds was found to generate both electric and magnetic fields during the reaction. According to the results, the relaxation of elastic energy provides efficient ordering of the growing crystals by weakening the bonds of the certain atoms. That is why the (111) surface is the optimal for silicon carbide growth by this method for semiconductor applications.

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原子配位置换过程中 CO 与单晶硅化学反应的弹性能量松弛
摘要 本研究从微观角度详细描述了硅晶体在硅(111)表面与一氧化碳气体反应生成碳化硅晶体的化学变化过程。研究采用了自旋极化 PBE 近似的密度泛函理论。利用 NEB 方法确定了所有中间(吸附)态和单一过渡态。结果表明,过渡态是一个 Si-O-C 三角形,键长分别为 1.94、1.24 和 2.29 Å。研究发现,悬空键的存在会在反应过程中产生电场和磁场。研究结果表明,弹性能量的松弛通过削弱某些原子的键来实现晶体生长的有效有序化。这就是为什么(111)表面是采用这种方法生长半导体应用领域碳化硅的最佳表面。
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来源期刊
Russian Journal of Inorganic Chemistry
Russian Journal of Inorganic Chemistry 化学-无机化学与核化学
CiteScore
3.10
自引率
38.10%
发文量
237
审稿时长
3 months
期刊介绍: Russian Journal of Inorganic Chemistry is a monthly periodical that covers the following topics of research: the synthesis and properties of inorganic compounds, coordination compounds, physicochemical analysis of inorganic systems, theoretical inorganic chemistry, physical methods of investigation, chemistry of solutions, inorganic materials, and nanomaterials.
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