The UmboMic: a PVDF cantilever microphone *

IF 2.4 4区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Journal of Micromechanics and Microengineering Pub Date : 2024-07-17 DOI:10.1088/1361-6439/ad5c6d

Aaron J Yeiser, Emma F Wawrzynek, John Z Zhang, Lukas Graf, Christopher I McHugh, Ioannis Kymissis, Elizabeth S Olson, Jeffrey H Lang and Hideko Heidi Nakajima

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Abstract

Objective. We present the ‘UmboMic,’ a prototype piezoelectric cantilever microphone designed for future use with totally-implantable cochlear implants. Methods. The UmboMic sensor is made from polyvinylidene difluoride (PVDF) because of its low Young’s modulus and biocompatibility. The sensor is designed to fit in the middle ear and measure the motion of the underside of the eardrum at the umbo. To maximize its performance, we developed a low noise charge amplifier in tandem with the UmboMic sensor. This paper presents the performance of the UmboMic sensor and amplifier in fresh cadaveric human temporal bones. Results. When tested in human temporal bones, the UmboMic apparatus achieves an equivalent input noise of 32.3 dB SPL over the frequency range 100 Hz–7 kHz, good linearity, and a flat frequency response to within 10 dB from about 100 Hz–6 kHz. Conclusion. These results demonstrate the feasibility of a PVDF-based microphone when paired with a low-noise amplifier. The reported UmboMic apparatus is comparable in performance to a conventional hearing aid microphone. Significance. The proof-of-concept UmboMic apparatus is a promising step towards creating a totally-implantable cochlear implant. A completely internal system would enhance the quality of life of cochlear implant users.

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UmboMic: PVDF 悬臂麦克风 *

目的。我们展示的 "UmboMic "是一种压电悬臂麦克风原型，设计用于未来的全植入式人工耳蜗。方法。UmboMic 传感器由聚偏二氟乙烯（PVDF）制成，因为它的杨氏模量低且具有生物相容性。该传感器设计用于安装在中耳内，测量鼓膜下缘的运动。为了最大限度地提高其性能，我们开发了一种与 UmboMic 传感器配套使用的低噪声电荷放大器。本文介绍了 UmboMic 传感器和放大器在新鲜人体颞骨中的性能。结果。在人体颞骨中进行测试时，UmboMic 设备在 100 Hz-7 kHz 频率范围内实现了 32.3 dB SPL 的等效输入噪声、良好的线性度和 10 dB 以内的平坦频率响应（约 100 Hz-6 kHz）。结论这些结果证明了基于 PVDF 的麦克风与低噪声放大器搭配使用的可行性。所报告的 UmboMic 设备在性能上与传统助听器麦克风相当。意义重大。概念验证型 UmboMic 设备是向制造完全可植入式人工耳蜗迈出的充满希望的一步。一个完全内置的系统将提高人工耳蜗用户的生活质量。

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来源期刊

Journal of Micromechanics and Microengineering 工程技术-材料科学：综合

CiteScore

4.50

自引率

4.30%

发文量

136

审稿时长

2.8 months

期刊介绍： Journal of Micromechanics and Microengineering (JMM) primarily covers experimental work, however relevant modelling papers are considered where supported by experimental data. The journal is focussed on all aspects of: -nano- and micro- mechanical systems -nano- and micro- electomechanical systems -nano- and micro- electrical and mechatronic systems -nano- and micro- engineering -nano- and micro- scale science Please note that we do not publish materials papers with no obvious application or link to nano- or micro-engineering. Below are some examples of the topics that are included within the scope of the journal: -MEMS and NEMS: Including sensors, optical MEMS/NEMS, RF MEMS/NEMS, etc. -Fabrication techniques and manufacturing: Including micromachining, etching, lithography, deposition, patterning, self-assembly, 3d printing, inkjet printing. -Packaging and Integration technologies. -Materials, testing, and reliability. -Micro- and nano-fluidics: Including optofluidics, acoustofluidics, droplets, microreactors, organ-on-a-chip. -Lab-on-a-chip and micro- and nano-total analysis systems. -Biomedical systems and devices: Including bio MEMS, biosensors, assays, organ-on-a-chip, drug delivery, cells, biointerfaces. -Energy and power: Including power MEMS/NEMS, energy harvesters, actuators, microbatteries. -Electronics: Including flexible electronics, wearable electronics, interface electronics. -Optical systems. -Robotics.