4H-SiC 64-pixels CMOS image sensors with 3T/4T-APS arrays

IF 4.7 Q2 MATERIALS SCIENCE, BIOMATERIALS ACS Applied Bio Materials Pub Date : 2024-07-22 DOI:10.35848/1882-0786/ad665f

Tatsuya Meguro, Masayuki Tsutsumi, A. Takeyama, T. Ohshima, Yasunori Tanaka, S. Kuroki

引用次数: 0

Abstract

For radiation-hardened CMOS image sensor (CIS), 4H-SiC 64-pixel array CMOS image sensors were developed, and the real time imaging with an operation frequency of 30 Hz was demonstrated. Two types of pixel arrays with a 3-transistor active pixel sensor (3T-APS) and a 4-transistor active pixel sensor (4T-APS) were fabricated with SiC MOSFETs, UV photodiodes and 3-layered Al interconnections. The SiC pixel arrays were combined with peripheral circuits and optical lens, and then SiC 64-pixels CMOS image sensors with 3T/4T-APS arrays were developed.

查看原文

微信好友朋友圈 QQ好友复制链接

本刊更多论文

配备 3T/4T-APS 阵列的 4H-SiC 64 像素 CMOS 图像传感器

针对辐射加固型 CMOS 图像传感器（CIS），开发了 4H-SiC 64 像素阵列 CMOS 图像传感器，并演示了工作频率为 30 Hz 的实时成像。利用碳化硅 MOSFET、UV 光电二极管和三层铝互连器件制作了两种像素阵列：3 晶体管有源像素传感器（3T-APS）和 4 晶体管有源像素传感器（4T-APS）。将 SiC 像素阵列与外围电路和光学透镜相结合，开发出了具有 3T/4T-APS 阵列的 SiC 64 像素 CMOS 图像传感器。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

求助全文

约1分钟内获得全文去求助

来源期刊

ACS Applied Bio Materials Chemistry-Chemistry (all)

CiteScore

9.40

自引率

2.10%

发文量

464

期刊介绍： ACS Applied Bio Materials is an interdisciplinary journal publishing original research covering all aspects of biomaterials and biointerfaces including and beyond the traditional biosensing, biomedical and therapeutic applications. The journal is devoted to reports of new and original experimental and theoretical research of an applied nature that integrates knowledge in the areas of materials, engineering, physics, bioscience, and chemistry into important bio applications. The journal is specifically interested in work that addresses the relationship between structure and function and assesses the stability and degradation of materials under relevant environmental and biological conditions.