A wireless multiparameter cryogenic monitoring method using passive backscatter sensors

Abstract

In this paper, we proposed the first wireless multiparameter monitoring method for cryogenic environments (−196 ℃). Present-day cryogenic industries implement a large array of wired sensors to monitor key parameters in fabrication processes. The wirings for a large sensor array greatly complicate the monitoring system. We presented the first wireless multiparameter monitoring method for cryogenic environments by making two efforts. First, a novel wireless passive vibration and pressure sensor is developed. We transfer vibrations and pressures to a relative displacement between a magnet and a tunnel magnetoresistor (TMR). This affects the magnetic field at the TMR and changes the TMR’s resistance. By integrating the TMR on a backscattering antenna, the antenna’s wireless return loss is modulated by both vibrations and pressures. We proposed a decoupling method for simultaneously monitoring vibration and pressure by a single sensor. Second, we demonstrated and evaluated the first wireless multiparameter cryogenic monitoring system. A wireless passive temperature sensor is developed by integrating a resistance temperature detector (RTD) on a backscattering antenna. The developed vibration and pressure sensor and temperature sensor are tuned to separate frequency bands, embedded in cryogenic environments, and calibrated in situ. Vibrations, pressures, and temperatures in cryogenic environments are synchronously obtained by our wireless cryogenic monitoring system, with an accuracy of 80∼90 %. This research provides a wireless option in large-scale automated cryogenic monitoring, thus it is desirable in implementing the Internet of Things in cryogenic industries.