{"title":"Modeling of Optical Systems for Obtaining X-Ray Images of Inclined Objects","authors":"A. S. Busarov, N. L. Popov","doi":"10.3103/S1068335624600670","DOIUrl":null,"url":null,"abstract":"<p>The paper discusses an optical layout for obtaining reduced X-ray oblique images, which can be useful for X-ray lithography problems. A special feature of the layout is the ability to illuminate the photomask at small grazing angles while recording images with minimal distortion. Using numerical simulations carried out for an X-ray laser with an operating wavelength of 13.9 nm, the spatial resolution and field of view of this system are found.</p>","PeriodicalId":503,"journal":{"name":"Bulletin of the Lebedev Physics Institute","volume":"51 7","pages":"244 - 249"},"PeriodicalIF":0.6000,"publicationDate":"2024-08-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Bulletin of the Lebedev Physics Institute","FirstCategoryId":"101","ListUrlMain":"https://link.springer.com/article/10.3103/S1068335624600670","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"PHYSICS, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 0
Abstract
The paper discusses an optical layout for obtaining reduced X-ray oblique images, which can be useful for X-ray lithography problems. A special feature of the layout is the ability to illuminate the photomask at small grazing angles while recording images with minimal distortion. Using numerical simulations carried out for an X-ray laser with an operating wavelength of 13.9 nm, the spatial resolution and field of view of this system are found.
期刊介绍：
Bulletin of the Lebedev Physics Institute is an international peer reviewed journal that publishes results of new original experimental and theoretical studies on all topics of physics: theoretical physics; atomic and molecular physics; nuclear physics; optics; lasers; condensed matter; physics of solids; biophysics, and others.
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