3.8 × 3.8 mm2 compact piezoelectric resonant MEMS scanner using fork-shaped and ring-shaped actuators

Abstract

This study presents a compact 3.8 × 3.8 mm² resonant piezoelectric micro-electro-mechanical systems scanner featuring a 1.0 mm mirror and double-coupling frames. It employs a novel mechanical coupling of two Pb(Zr,Ti)O₃ piezoelectric actuators–fork-shaped and ring-shaped. This dual-actuator configuration enhances the efficiency of actuator area usage per die and significantly improves the resonant frequency through their mechanical coupling. Additionally, the design strategy effectively reduces mechanical stress by operating the scanning frequency above those of other modes. The resonant frequency achieved by the proposed scanner is 27.09 kHz, with an optical scan angle of 40^∘, utilizing a unipolar driving voltage of 25.2 V.