Study on the development of CeO2 self-sharpening gel abrasive tools and grinding performance on quartz glass

Abstract

To solve the problem that the surface of conventional CeO₂ abrasive tools tends to glaze during the grinding process, water-resistant aluminum nitride powder (A/S powder) is added into abrasive tools to improve the self-sharpening ability. The effect of acetic acid content and sintering temperature on the water resistance of A/S powder is studied. The porosity, pre-grinding and mechanical properties of abrasive tools with different A/S powder content are tested. It is found that when the mixed A/S powder content is 9 wt%, there is no obvious glaze layer on the surface of abrasive tools, and the material removal rate is the highest. The result of grinding experiment shows that the glazing phenomenon is ameliorated and the surface roughness R_a and the flatness PV of quartz glass reaches 1.876 nm and 1.651 µm after the chemical mechanical polishing (CMP).