Effect of probe structure on wave transmission spectra of microwave cutoff probe

IF 2.7 3区 物理与天体物理 Q2 PHYSICS, APPLIED Journal of Applied Physics Pub Date : 2024-08-30 DOI:10.1063/5.0221290
Jae-Heon Lee, Hee-Jung Yeom, Gwang-Seok Chae, Jung-Hyung Kim, Hyo-Chang Lee
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Abstract

In this study, we examined the potential errors in plasma-density measurements using the cutoff probe method under various structural conditions, such as tip distance and length. Our studies indicate that under conditions of thin sheath thickness, the length or distance of the metal tips on the cutoff probe has a slight effect on the plasma transmission spectrum or cutoff frequency. However, under conditions with a notably thick sheath, the structure of the probe tip can cause an error of up to 2% between the measured cutoff frequency and actual plasma frequency. Consequently, for precise measurements of plasma density using the cutoff probe method, it is imperative to maintain a probe tip distance exceeding five times the sheath width and utilize a sufficiently long probe tip length. This finding is anticipated to provide essential guidelines for the design and fabrication of effective cutoff probes and enhance the accuracy of plasma-density measurements using a cutoff probe.
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探头结构对微波截止探头透射波谱的影响
在这项研究中,我们研究了在不同的结构条件下(如针尖距离和长度)使用截止探针法测量等离子体密度的潜在误差。我们的研究表明,在鞘厚度较薄的条件下,截止探针上金属尖端的长度或距离对等离子体透射谱或截止频率的影响很小。然而,在鞘明显较厚的条件下,探头尖端的结构会导致测量的截止频率与实际等离子体频率之间出现高达 2% 的误差。因此,要使用截止探针法精确测量等离子体密度,必须保持探针尖端距离超过鞘宽的五倍,并使用足够长的探针尖端长度。预计这一发现将为设计和制造有效的截止探针提供重要指导,并提高使用截止探针测量等离子体密度的精度。
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来源期刊
Journal of Applied Physics
Journal of Applied Physics 物理-物理:应用
CiteScore
5.40
自引率
9.40%
发文量
1534
审稿时长
2.3 months
期刊介绍: The Journal of Applied Physics (JAP) is an influential international journal publishing significant new experimental and theoretical results of applied physics research. Topics covered in JAP are diverse and reflect the most current applied physics research, including: Dielectrics, ferroelectrics, and multiferroics- Electrical discharges, plasmas, and plasma-surface interactions- Emerging, interdisciplinary, and other fields of applied physics- Magnetism, spintronics, and superconductivity- Organic-Inorganic systems, including organic electronics- Photonics, plasmonics, photovoltaics, lasers, optical materials, and phenomena- Physics of devices and sensors- Physics of materials, including electrical, thermal, mechanical and other properties- Physics of matter under extreme conditions- Physics of nanoscale and low-dimensional systems, including atomic and quantum phenomena- Physics of semiconductors- Soft matter, fluids, and biophysics- Thin films, interfaces, and surfaces
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