{"title":"Local Anodic Oxidation of Silicon for Create Crossbar Architecture","authors":"V. V. Polyakova, A. V. Saenko","doi":"10.1134/s1063784224010316","DOIUrl":null,"url":null,"abstract":"<h3 data-test=\"abstract-sub-heading\">Abstract</h3><p>Paper present possibility of creation a neuromatrix in the form crossbar architecture on a silicon substrate is shown. Crossbar architecture in the form of a set of nanosized conductors, between which there is a layer of titanium oxide, capable of changing its conductivity under the action of the applied voltage, it is proposed to form using the metho d of local anodic oxidation. The results is present of the study technological parameters of the metho d of local anodic oxidation silicon and titanium for the implementation of the elements of this neuromatrix in the form of a memristor structures.</p>","PeriodicalId":783,"journal":{"name":"Technical Physics","volume":null,"pages":null},"PeriodicalIF":1.1000,"publicationDate":"2024-09-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Technical Physics","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.1134/s1063784224010316","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"PHYSICS, APPLIED","Score":null,"Total":0}
引用次数: 0
Abstract
Paper present possibility of creation a neuromatrix in the form crossbar architecture on a silicon substrate is shown. Crossbar architecture in the form of a set of nanosized conductors, between which there is a layer of titanium oxide, capable of changing its conductivity under the action of the applied voltage, it is proposed to form using the metho d of local anodic oxidation. The results is present of the study technological parameters of the metho d of local anodic oxidation silicon and titanium for the implementation of the elements of this neuromatrix in the form of a memristor structures.
期刊介绍：
Technical Physics is a journal that contains practical information on all aspects of applied physics, especially instrumentation and measurement techniques. Particular emphasis is put on plasma physics and related fields such as studies of charged particles in electromagnetic fields, synchrotron radiation, electron and ion beams, gas lasers and discharges. Other journal topics are the properties of condensed matter, including semiconductors, superconductors, gases, liquids, and different materials.
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