A. E. Pestov, M. S. Mikhailenko, A. K. Chernyshev, M. V. Zorina, N. I. Chkhalo
{"title":"Model of Physical Sputtering of Amorphous Materials","authors":"A. E. Pestov, M. S. Mikhailenko, A. K. Chernyshev, M. V. Zorina, N. I. Chkhalo","doi":"10.1134/s1063784224010304","DOIUrl":null,"url":null,"abstract":"<h3 data-test=\"abstract-sub-heading\">Abstract</h3><p>The paper demonstrates the pulse mechanism of physical sputtering taking into account the evolution of the surface. The model is based on pulsed energy transfer in collision cascades. The main feature is the consideration of surface roughness. The results of numerical simulation qualitatively coincide with those observed in experiments. It is shown that the angular dependences calculated in the framework of this model have closer values of the sputtering yields to the experimental ones than those calculated in TRIM.</p>","PeriodicalId":783,"journal":{"name":"Technical Physics","volume":null,"pages":null},"PeriodicalIF":1.1000,"publicationDate":"2024-09-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Technical Physics","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.1134/s1063784224010304","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"PHYSICS, APPLIED","Score":null,"Total":0}
引用次数: 0
Abstract
The paper demonstrates the pulse mechanism of physical sputtering taking into account the evolution of the surface. The model is based on pulsed energy transfer in collision cascades. The main feature is the consideration of surface roughness. The results of numerical simulation qualitatively coincide with those observed in experiments. It is shown that the angular dependences calculated in the framework of this model have closer values of the sputtering yields to the experimental ones than those calculated in TRIM.
期刊介绍：
Technical Physics is a journal that contains practical information on all aspects of applied physics, especially instrumentation and measurement techniques. Particular emphasis is put on plasma physics and related fields such as studies of charged particles in electromagnetic fields, synchrotron radiation, electron and ion beams, gas lasers and discharges. Other journal topics are the properties of condensed matter, including semiconductors, superconductors, gases, liquids, and different materials.
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