Dispersion Elements for X-ray Mirror Spectrometer on a Range of 7–30 nm

Abstract

Multilayer interference structures acting as dispersion elements for a mirror spectrometer for a wavelength range of 7–30 nm have been calculated and synthesized. Three elements are implemented: for the range λ = 7–12 nm – multilayer structure Mo/B₄C (number of periods N = 60, period thickness d = 6.5 nm); for the range λ = 11–18 nm – Mo/Be (N = 50; d = 9.83 nm) and for the range λ = 17–30 nm – Be/Si/Al (N = 40; d = 18.2 nm). For the entire spectral range, an efficiency of more than 10% was obtained at a wavelength resolution of 0.15–1.0 nm.