Incidence Angle Effect on Oxide Charge Kinetics

Abstract

This article presents a detailed study of the variation of secondary electron emission as a function of the primary energy. This study is performed with a dedicated scanning electron microscope on the electrical property evolution of the magnesium oxide (100) single crystal. It is shown that the crystalline orientation has a significant influence on the intrinsic secondary electron emission at low energies below 7 keV, but for high energies, the loss function of the secondary energy extending more deeply, disperses before its release. As the incidence angle of the primary beam energy differs from the normal and takes important values, the secondary electron yield increases. The increase in the incidence angle has a similar and complementary effect on the current density growth.