Amy Navarathna, Benjamin J Carey, James S Bennett, Soroush Khademi, Warwick P Bowen
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引用次数: 0
Abstract
Whispering Gallery Mode (WGM) optomechanical resonators are a promising technology for the simultaneous control and measurement of optical and mechanical degrees of freedom at the nanoscale. They offer potential for use across a wide range of applications such as sensors and quantum transducers. Double-disk WGM resonators, which host strongly interacting mechanical and optical modes co-localized around their circumference, are particularly attractive due to their high optomechanical coupling. Large-scale integrated fabrication of silicon double-disk WGM resonators has not previously been demonstrated. In this work, we present a process for the fabrication of double-layer silicon-on-insulator wafers, which we then use to fabricate functional optomechanical double silicon disk resonators with on-chip optical coupling. The integrated devices present experimentally observed optical quality factors of the order of 105 and a single-photon optomechanical coupling of approximately 15 kHz.
期刊介绍:
Optics Express is the all-electronic, open access journal for optics providing rapid publication for peer-reviewed articles that emphasize scientific and technology innovations in all aspects of optics and photonics.