Application of SEM-CL system in the characterization of material microstructures

Abstract

Cathodoluminescence (CL) characterization technology refers to a technical approach for evaluating the luminescent properties of samples by collecting photon signals generated under electron beam excitation. By detecting the intensity and wavelength of the emitted light, the energy band structure and forbidden bandwidth of a sample can be identified. After a CL spectrometer is mounted on a scanning electron microscope (SEM), functions are integrated, such as high spatial resolution, morphological observation, and energy-dispersive spectroscopy (EDS) to analyze samples, offering unique and irreplaceable advantages for the microstructural analysis of certain materials. This paper reviews the applications of SEM-CL systems in the characterization of material microstructures in recent years, illustrating the utility of the SEM-CL system in various materials including geological minerals, perovskite materials, semiconductor materials, non-metallic inclusions, and functional ceramics through typical case studies.