Laser writing of metal-oxide doped graphene films for tunable sensor applications†

Abstract

Flexible and wearable devices play a pivotal role in the realm of smart portable electronics due to their diverse applications in healthcare monitoring, soft robotics, human–machine interfaces, and artificial intelligence. Nonetheless, the extensive integration of intelligent wearable sensors into mass production faces challenges within a resource-limited environment, necessitating low-cost manufacturing, high reliability, stability, and multi-functionality. In this study, a cost-effective fiber laser direct writing method (fLDW) was illustrated to create highly responsive and robust flexible sensors. These sensors integrate laser-induced graphene (LiG) with mixed metal oxides on a flexible polyimide film. fLDW simplifies the synthesis of graphene, functionalization of carbon structures into graphene oxides and reduced graphene oxides, and deposition of metal-oxide nanoparticles within a single experimental laser writing setup. The preparation and surface modification of dense oxygenated graphene networks and semiconducting metal oxide nanoparticles (CuO_x, ZnO_x, FeO_x) enables rapid fabrication of LiG/MO_x composite sensors with the ability to detect and differentiate various stimuli, including visible light, UV light, temperature, humidity, and magnetic fluxes. Further, this in situ customizability of fLDW-produced sensors allows for tunable sensitivity, response time, recovery time, and selectivity. The normalized current gain of resistive LiG/MO_x sensors can be controlled between −2.7 to 3.5, with response times ranging from 0.02 to 15 s, and recovery times from 0.04 to 6 s. Furthermore, the programmable properties showed great endurance after 200 days in air and extended bend cycles. Collectively, these LiG/MO_x sensors stand as a testament to the effectiveness of fLDW in economically mass-producing flexible and wearable electronic devices to meet the explicit demands of the Internet of Things.