Experimental investigation on enhanced ablation of silicon with the combined pulse laser.

IF 3.1 2区 物理与天体物理 Q2 OPTICS Optics letters Pub Date : 2024-12-15 DOI:10.1364/OL.541964
Hao Liu, Jifei Ye, Wei Rao, Haichao Cui, Sibo Wang
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Abstract

The combined pulse laser (CPL) based on long-pulsed lasers has been proven to be an effective way of improving laser processing efficiency by combining their processing advantages. In this Letter, a CPL with a 500 mJ millisecond pulse and a 150 mJ nanosecond pulse is utilized to study the interaction process between laser and silicon. Based on high-speed images of plasma distribution and laser supported detonation wave (LSDW), as well as the height characteristics of ablation morphology, the energy coupling of plasma with variable delay time is analyzed. The irradiation of the material by millisecond pulse within the delay time enhances the strong coupling process between nanosecond pulse and the target.

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利用组合脉冲激光器增强硅烧蚀的实验研究。
以长脉冲激光器为基础的组合脉冲激光器(CPL)已被证明是结合长脉冲激光器的加工优势,提高激光加工效率的有效途径。本文利用500 mJ毫秒脉冲和150 mJ纳秒脉冲的CPL来研究激光与硅的相互作用过程。基于等离子体分布和激光支撑爆震波(LSDW)的高速图像,以及烧蚀形貌的高度特征,分析了变延迟时间等离子体的能量耦合。毫秒脉冲在延迟时间内对材料的辐照增强了纳秒脉冲与靶材之间的强耦合过程。
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来源期刊
Optics letters
Optics letters 物理-光学
CiteScore
6.60
自引率
8.30%
发文量
2275
审稿时长
1.7 months
期刊介绍: The Optical Society (OSA) publishes high-quality, peer-reviewed articles in its portfolio of journals, which serve the full breadth of the optics and photonics community. Optics Letters offers rapid dissemination of new results in all areas of optics with short, original, peer-reviewed communications. Optics Letters covers the latest research in optical science, including optical measurements, optical components and devices, atmospheric optics, biomedical optics, Fourier optics, integrated optics, optical processing, optoelectronics, lasers, nonlinear optics, optical storage and holography, optical coherence, polarization, quantum electronics, ultrafast optical phenomena, photonic crystals, and fiber optics. Criteria used in determining acceptability of contributions include newsworthiness to a substantial part of the optics community and the effect of rapid publication on the research of others. This journal, published twice each month, is where readers look for the latest discoveries in optics.
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