Paula Mouriño, Laura Mercadé, Miguel Sinusía Lozano, Raquel Resta, Amadeu Griol, Karim Ben Saddik, Enrique Barrigón, Sergio Fernández-Garrido, Basilio Javier García, Alejandro Martínez, Víctor J. Gómez
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引用次数: 0
Abstract
Cavity Optomechanics
In article number 2400525, Víctor J. Gómez and co-workers present the process of fabrication of a GaP optomechanical epitaxially grown on exact (001)-Si following a novel two-step dry-etching process. This suggests a simple and lowcost way to build GaP-based photonic devices directly integrated on Si(001) photonic wafers.
Cavity Optomechanics在编号为 2400525 的文章中，Víctor J. Gómez 及其合作者介绍了采用新颖的两步干蚀刻工艺在精确 (001)-Si 上外延生长的 GaP 光机械的制造过程。这为在硅(001)光子晶片上直接集成基于 GaP 的光子器件提供了一种简单而低成本的方法。
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