A. V. Povolotskiy, E. V. Smirnov, Yu. S. Tver’yanovich
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引用次数: 0
Abstract
The process of the formation of diamond-like carbon films on the surface of monocrystalline silicon is studied. The film is formed as a result of the plasma-chemical decomposition of hydrocarbons (propane, butane) and subsequent annealing in a vacuum. The carbon film is formed in the form of diamond-like nanoparticles with a diameter of about 8 nm. Silicon–carbon bonds are formed at the boundary of the silicon substrate and the carbon film, which ensures strong adhesion.
期刊介绍：
Glass Physics and Chemistry presents results of research on the inorganic and physical chemistry of glass, ceramics, nanoparticles, nanocomposites, and high-temperature oxides and coatings. The journal welcomes manuscripts from all countries in the English or Russian language.
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