{"title":"Wafer Defect Classification Algorithm With Label Embedding Using Contrastive Learning","authors":"Jeongjoon Hwang;Somi Ha;Dohyun Kim","doi":"10.1109/ACCESS.2025.3527491","DOIUrl":null,"url":null,"abstract":"Classifying wafer defects in the wafer manufacturing process is increasingly critical for ensuring high-quality production, optimizing processes, and reducing costs. Most existing methods for wafer map defect classification primarily rely on images alone for model training and prediction. However, these approaches often lack interpretability, which can hinder process improvement and problem-solving efforts. In other words, existing methods only calculate the probability of a specific image belonging to each class, making it difficult to visually judge why the image belongs to a particular class. Additionally, these methods make it challenging to assess the distance of new images from each class. Furthermore, it is difficult to obtain representative images of each class. To address these limitations, we propose a novel approach for wafer defect classification using contrastive learning with label embedding. The proposed method aims to map label information and wafer defect images into a shared latent space through contrastive learning using label embedding. This not only facilitates defect class prediction from images but also enhances interpretability by visualizing relationships between images and defects (labels) and providing representative defect images. Moreover, compared to previous methods, our approach demonstrates better classification performance and computational efficiency, even in situations with imbalanced labels. This method also shows significant potential in identifying unseen defects not defined in the original classification tasks. Consequently, the proposed approach extends its applicability beyond wafer map defect patterns, showing promising potential for use in various domains.","PeriodicalId":13079,"journal":{"name":"IEEE Access","volume":"13 ","pages":"9708-9717"},"PeriodicalIF":3.4000,"publicationDate":"2025-01-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10835094","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Access","FirstCategoryId":"94","ListUrlMain":"https://ieeexplore.ieee.org/document/10835094/","RegionNum":3,"RegionCategory":"计算机科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"COMPUTER SCIENCE, INFORMATION SYSTEMS","Score":null,"Total":0}
引用次数: 0
Abstract
Classifying wafer defects in the wafer manufacturing process is increasingly critical for ensuring high-quality production, optimizing processes, and reducing costs. Most existing methods for wafer map defect classification primarily rely on images alone for model training and prediction. However, these approaches often lack interpretability, which can hinder process improvement and problem-solving efforts. In other words, existing methods only calculate the probability of a specific image belonging to each class, making it difficult to visually judge why the image belongs to a particular class. Additionally, these methods make it challenging to assess the distance of new images from each class. Furthermore, it is difficult to obtain representative images of each class. To address these limitations, we propose a novel approach for wafer defect classification using contrastive learning with label embedding. The proposed method aims to map label information and wafer defect images into a shared latent space through contrastive learning using label embedding. This not only facilitates defect class prediction from images but also enhances interpretability by visualizing relationships between images and defects (labels) and providing representative defect images. Moreover, compared to previous methods, our approach demonstrates better classification performance and computational efficiency, even in situations with imbalanced labels. This method also shows significant potential in identifying unseen defects not defined in the original classification tasks. Consequently, the proposed approach extends its applicability beyond wafer map defect patterns, showing promising potential for use in various domains.
IEEE AccessCOMPUTER SCIENCE, INFORMATION SYSTEMSENGIN-ENGINEERING, ELECTRICAL & ELECTRONIC
CiteScore
9.80
自引率
7.70%
发文量
6673
审稿时长
6 weeks
期刊介绍:
IEEE Access® is a multidisciplinary, open access (OA), applications-oriented, all-electronic archival journal that continuously presents the results of original research or development across all of IEEE''s fields of interest.
IEEE Access will publish articles that are of high interest to readers, original, technically correct, and clearly presented. Supported by author publication charges (APC), its hallmarks are a rapid peer review and publication process with open access to all readers. Unlike IEEE''s traditional Transactions or Journals, reviews are "binary", in that reviewers will either Accept or Reject an article in the form it is submitted in order to achieve rapid turnaround. Especially encouraged are submissions on:
Multidisciplinary topics, or applications-oriented articles and negative results that do not fit within the scope of IEEE''s traditional journals.
Practical articles discussing new experiments or measurement techniques, interesting solutions to engineering.
Development of new or improved fabrication or manufacturing techniques.
Reviews or survey articles of new or evolving fields oriented to assist others in understanding the new area.