Transparent Microheater Enabled by Laser Perforation of the Thin CaSi2 Film

IF 0.48 Q4 Physics and Astronomy Bulletin of the Russian Academy of Sciences: Physics Pub Date : 2025-02-27 DOI:10.1134/S1062873824709942

D. V. Pavlov, V. M. Il’yaschenko, A. V. Bozhok, D. E. Banniy, A. A. Kuchmizhak, A. V. Shevlyagin

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Abstract

We report highly transparent in the wide band optical range of (0.4–7) µm mesh electrodes fabricated on thin semimetal films of semimetal calcium disilicide (CaSi₂) by utilizing femtosecond laser ablation technique with flat top beam shaped geometry. Compared with continuous films, mesh electrodes demonstrate an increase in the figure of merit as transparent conducting materials from 0.3 up to 0.9 Ω^–1. Of importance, CaSi₂ retains low sheet resistance not exceeding 20 Ω/sq after laser processing. Obtained material parameters allowed testing CaSi₂ mesh electrodes under actual conditions as transparent heater. The surface temperature as high as 150°C under low applied DC voltage of 8 V has been approved by infrared camera. CaSi₂ heater possess hysteresis free behavior with response as fast as 40 s and excellent stability under the cyclic operation. Thus, laser perforated CaSi₂ thin films could be considered as a material of choice for the infrared optoelectronic applications, smart windows and miniature heaters for microscopic observations of biological samples.

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激光穿孔CaSi2薄膜实现透明微加热器

我们报道了利用飞秒激光烧蚀技术在半金属二硅化钙（CaSi2）的半金属薄膜上制作的高透明(0.4-7)μ m宽带光学范围内的网状电极。与连续薄膜相比，网状电极作为透明导电材料的性能值从0.3增加到0.9 Ω-1。重要的是，CaSi2在激光加工后保持了不超过20 Ω/sq的低片电阻。获得的材料参数允许在实际条件下测试CaSi2网状电极作为透明加热器。经红外摄像机检测，在低施加8v直流电压下，表面温度可高达150℃。CaSi2加热器具有无迟滞特性，在循环运行下响应快达40 s，稳定性好。因此，激光穿孔CaSi2薄膜可作为红外光电应用、智能窗口和微型加热器的首选材料，用于生物样品的微观观察。

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来源期刊

Bulletin of the Russian Academy of Sciences: Physics Physics and Astronomy-Physics and Astronomy (all)

CiteScore

0.90

自引率

0.00%

发文量

251

期刊介绍： Bulletin of the Russian Academy of Sciences: Physics is an international peer reviewed journal published with the participation of the Russian Academy of Sciences. It presents full-text articles (regular, letters to the editor, reviews) with the most recent results in miscellaneous fields of physics and astronomy: nuclear physics, cosmic rays, condensed matter physics, plasma physics, optics and photonics, nanotechnologies, solar and astrophysics, physical applications in material sciences, life sciences, etc. Bulletin of the Russian Academy of Sciences: Physics focuses on the most relevant multidisciplinary topics in natural sciences, both fundamental and applied. Manuscripts can be submitted in Russian and English languages and are subject to peer review. Accepted articles are usually combined in thematic issues on certain topics according to the journal editorial policy. Authors featured in the journal represent renowned scientific laboratories and institutes from different countries, including large international collaborations. There are globally recognized researchers among the authors: Nobel laureates and recipients of other awards, and members of national academies of sciences and international scientific societies.