D. V. Pavlov, V. M. Il’yaschenko, A. V. Bozhok, D. E. Banniy, A. A. Kuchmizhak, A. V. Shevlyagin
{"title":"Transparent Microheater Enabled by Laser Perforation of the Thin CaSi2 Film","authors":"D. V. Pavlov, V. M. Il’yaschenko, A. V. Bozhok, D. E. Banniy, A. A. Kuchmizhak, A. V. Shevlyagin","doi":"10.1134/S1062873824709942","DOIUrl":null,"url":null,"abstract":"<p>We report highly transparent in the wide band optical range of (0.4–7) µm mesh electrodes fabricated on thin semimetal films of semimetal calcium disilicide (CaSi<sub>2</sub>) by utilizing femtosecond laser ablation technique with flat top beam shaped geometry. Compared with continuous films, mesh electrodes demonstrate an increase in the figure of merit as transparent conducting materials from 0.3 up to 0.9 Ω<sup>–1</sup>. Of importance, CaSi<sub>2</sub> retains low sheet resistance not exceeding 20 Ω/sq after laser processing. Obtained material parameters allowed testing CaSi<sub>2</sub> mesh electrodes under actual conditions as transparent heater. The surface temperature as high as 150°C under low applied DC voltage of 8 V has been approved by infrared camera. CaSi<sub>2</sub> heater possess hysteresis free behavior with response as fast as 40 s and excellent stability under the cyclic operation. Thus, laser perforated CaSi<sub>2</sub> thin films could be considered as a material of choice for the infrared optoelectronic applications, smart windows and miniature heaters for microscopic observations of biological samples.</p>","PeriodicalId":504,"journal":{"name":"Bulletin of the Russian Academy of Sciences: Physics","volume":"88 3 supplement","pages":"S418 - S422"},"PeriodicalIF":0.4800,"publicationDate":"2025-02-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Bulletin of the Russian Academy of Sciences: Physics","FirstCategoryId":"1085","ListUrlMain":"https://link.springer.com/article/10.1134/S1062873824709942","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"Physics and Astronomy","Score":null,"Total":0}
引用次数: 0
Abstract
We report highly transparent in the wide band optical range of (0.4–7) µm mesh electrodes fabricated on thin semimetal films of semimetal calcium disilicide (CaSi2) by utilizing femtosecond laser ablation technique with flat top beam shaped geometry. Compared with continuous films, mesh electrodes demonstrate an increase in the figure of merit as transparent conducting materials from 0.3 up to 0.9 Ω–1. Of importance, CaSi2 retains low sheet resistance not exceeding 20 Ω/sq after laser processing. Obtained material parameters allowed testing CaSi2 mesh electrodes under actual conditions as transparent heater. The surface temperature as high as 150°C under low applied DC voltage of 8 V has been approved by infrared camera. CaSi2 heater possess hysteresis free behavior with response as fast as 40 s and excellent stability under the cyclic operation. Thus, laser perforated CaSi2 thin films could be considered as a material of choice for the infrared optoelectronic applications, smart windows and miniature heaters for microscopic observations of biological samples.
期刊介绍:
Bulletin of the Russian Academy of Sciences: Physics is an international peer reviewed journal published with the participation of the Russian Academy of Sciences. It presents full-text articles (regular, letters to the editor, reviews) with the most recent results in miscellaneous fields of physics and astronomy: nuclear physics, cosmic rays, condensed matter physics, plasma physics, optics and photonics, nanotechnologies, solar and astrophysics, physical applications in material sciences, life sciences, etc. Bulletin of the Russian Academy of Sciences: Physics focuses on the most relevant multidisciplinary topics in natural sciences, both fundamental and applied. Manuscripts can be submitted in Russian and English languages and are subject to peer review. Accepted articles are usually combined in thematic issues on certain topics according to the journal editorial policy. Authors featured in the journal represent renowned scientific laboratories and institutes from different countries, including large international collaborations. There are globally recognized researchers among the authors: Nobel laureates and recipients of other awards, and members of national academies of sciences and international scientific societies.