A 430-μA 68.2-dB-SNR 133-dBSPL-AOP CMOS-MEMS Digital Microphone Based on Electrostatic Force Feedback Control

{"title":"A 430-μA 68.2-dB-SNR 133-dBSPL-AOP CMOS-MEMS Digital Microphone Based on Electrostatic Force Feedback Control","authors":"Jiaqi Dong, Qi Zhang, Xinwen Zhang, Yekan Chen, Yili Shen, Bo Zhao, Yuxuan Luo","doi":"10.1109/jssc.2025.3531509","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":13129,"journal":{"name":"IEEE Journal of Solid-state Circuits","volume":"67 1","pages":""},"PeriodicalIF":4.6000,"publicationDate":"2025-03-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Journal of Solid-state Circuits","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1109/jssc.2025.3531509","RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}