Optimized synchronization efficiency in micromechanical arch beams

IF 9.4 1区工程技术 Q1 ENGINEERING, MECHANICAL International Journal of Mechanical Sciences Pub Date : 2025-04-15 Epub Date: 2025-03-07 DOI:10.1016/j.ijmecsci.2025.110098

Zunhao Xiao , Zhan Shi , Qiangfeng Lv , Xuefeng Wang , Xueyong Wei , Ronghua Huan

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Abstract

Synchronization phenomena in MEMS devices are extensively studied due to their critical applications and intricate dynamics. Nevertheless, research on synchronization time – key to sensor performance – remains sparse. Current optimization efforts are predominantly focused on device fabrication and signal transmission, while dynamics approaches are limited to perfected straight beams, which can deviate in practical applications. In this study, we explore the dynamics of synchronization in a clamped–clamped micromechanical arch beam, modulated by electrothermal currents. Initially, we employed electrothermal currents to achieve an optimal synchronization time. Our theoretical analysis demonstrated that reducing equivalent nonlinearity leads to a shorter synchronization time. This effect was experimentally verified by manipulating the static DC voltage in electrostatic excitation to control the nonlinearity. By combining electrothermal current regulation and nonlinearity control, we substantially reduced synchronization time by 84%, from 1.170 s to 0.182 s. These results introduce a novel strategy for enhancing the detection efficiency of synchronization sensors, with broad implications for sensor technology.

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优化微机械拱形梁的同步效率

MEMS器件中的同步现象由于其关键的应用和复杂的动力学而被广泛研究。然而，对同步时间——传感器性能的关键——的研究仍然很少。目前的优化工作主要集中在器件制造和信号传输上，而动力学方法仅限于完善的直光束，这在实际应用中可能会偏离。在这项研究中，我们探索了电热电流调制的夹紧-夹紧微机械拱梁的同步动力学。最初，我们采用电热电流来实现最佳同步时间。我们的理论分析表明，减少等效非线性可以缩短同步时间。通过实验验证了这种效应，通过在静电激励下操纵静态直流电压来控制非线性。通过结合电热电流调节和非线性控制，同步时间从1.170 s大幅降低到0.182 s，减少了84%。这些结果为提高同步传感器的检测效率提供了一种新的策略，对传感器技术具有广泛的意义。

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来源期刊

International Journal of Mechanical Sciences 工程技术-工程：机械

CiteScore

12.80

自引率

17.80%

发文量

769

审稿时长

19 days

期刊介绍： The International Journal of Mechanical Sciences (IJMS) serves as a global platform for the publication and dissemination of original research that contributes to a deeper scientific understanding of the fundamental disciplines within mechanical, civil, and material engineering. The primary focus of IJMS is to showcase innovative and ground-breaking work that utilizes analytical and computational modeling techniques, such as Finite Element Method (FEM), Boundary Element Method (BEM), and mesh-free methods, among others. These modeling methods are applied to diverse fields including rigid-body mechanics (e.g., dynamics, vibration, stability), structural mechanics, metal forming, advanced materials (e.g., metals, composites, cellular, smart) behavior and applications, impact mechanics, strain localization, and other nonlinear effects (e.g., large deflections, plasticity, fracture). Additionally, IJMS covers the realms of fluid mechanics (both external and internal flows), tribology, thermodynamics, and materials processing. These subjects collectively form the core of the journal's content. In summary, IJMS provides a prestigious platform for researchers to present their original contributions, shedding light on analytical and computational modeling methods in various areas of mechanical engineering, as well as exploring the behavior and application of advanced materials, fluid mechanics, thermodynamics, and materials processing.