M. V. Shandrikov, M. I. Azhgikhin, A. S. Bugaev, A. A. Cherkasov, P. V. Moskvin, E. M. Oks, K. P. Savkin, K. A. Shcheglov, G. Yu. Yushkov
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引用次数: 0
Abstract
We presented results of an experimental study of a continuous magnetron discharge in vacuum (gasless) mode with a flat target. The base pressure in the vacuum chamber during the discharge operation was 3 × 10–5 Torr at a magnetron current of 10 A. We developed techniques for measuring the mass-to-charge composition of plasma ions and the electron temperature under conditions of intense target sputtering. Measurement of target temperature was carried out. We developed techniques for comparison of ion current density and degree of ionization of the target material near the substrate in gas and vacuum modes.
期刊介绍：
Bulletin of the Russian Academy of Sciences: Physics is an international peer reviewed journal published with the participation of the Russian Academy of Sciences. It presents full-text articles (regular, letters to the editor, reviews) with the most recent results in miscellaneous fields of physics and astronomy: nuclear physics, cosmic rays, condensed matter physics, plasma physics, optics and photonics, nanotechnologies, solar and astrophysics, physical applications in material sciences, life sciences, etc. Bulletin of the Russian Academy of Sciences: Physics focuses on the most relevant multidisciplinary topics in natural sciences, both fundamental and applied. Manuscripts can be submitted in Russian and English languages and are subject to peer review. Accepted articles are usually combined in thematic issues on certain topics according to the journal editorial policy. Authors featured in the journal represent renowned scientific laboratories and institutes from different countries, including large international collaborations. There are globally recognized researchers among the authors: Nobel laureates and recipients of other awards, and members of national academies of sciences and international scientific societies.
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