Development of Electrostatic Dual-Carbon-Fiber Microgrippers for Precise 2D Patterning and 3D Stacking of Single Microparticles

Abstract

This study presents the development of electrostatic dual-carbon-fiber (CF) microgrippers for the precise manipulation of single SiO₂ microparticles (diameters >3 µm) at low operating voltages of 5 to 15 V. Theoretical calculations and finite element analysis (FEA) simulations demonstrate that the microgrippers utilize a non-uniform electric field generated by dual CF electrodes to create a dielectrophoresis force for the pick-and-place manipulation of microparticle. After the removal of dielectrophoresis force by turning off the voltage, particle release is facilitated by van der Waals forces from the substrate surface. This approach eliminates the need for additional corona discharge fields or vibrational separators for particle release, ensuring accurate 2D patterning and 3D stacking of SiO₂ microparticles. The microgrippers show significant potential for applications in the individual separation and assembly of microparticles, such as lunar soil and interstellar dust, as well as single-cell extraction and positioning. Additionally, the developed microgrippers offer broad utility in micro/nano-manufacturing, micro/nano-electronic circuits, physics, chemistry, and biomedicine.