A Ti/Pt Hot Wire Anemometer and its SiO₂ Enhanced Structural Implementation for Mechanical Ventilators

Abstract

This study presents the development and implementation of a microfabricated hot-wire anemometer designed for mechanical ventilators. The sensor is fabricated using MEMS techniques, incorporating a SiO₂ bridge that enhances structural integrity while enabling precise airflow measurement up to 326 lpm (63.3 m⋅s⁻¹). The design leverages the principles of thermal anemometry, utilizing a platinum heating element with optimized mechanical support to ensure high sensitivity and durability. Performance evaluations confirm the sensor’s compliance with ISO 80601–2-12 standards for mechanical ventilators, demonstrating high stability, minimal hysteresis, and fast response times. Additionally, endurance testing validates the sensor's robustness under extreme conditions. These results highlight the potential of this hot-wire anemometer for clinical applications, providing an alternative to conventional airflow sensors with improved structural resilience and measurement accuracy.