Dual-Channel Electrostatically Actuated MEMS Fabry–Perot Filtering Module for Near-Infrared Spectroscopic Detection

Abstract

MEMS-based Fabry–Perot filter components (MEMS-FPC) have garnered significant attention in the field of micro-spectrometers due to their ability to perform high-efficiency spectral analysis at the microscale. However, achieving optimal peak transmission performance across a broad spectral range remains a core challenge in the development of MEMS-FPC modules. In this work, a novel dual-channel is presented, electrostatically actuated NIR MEMS-FPC filter module that overcomes the limitations of electrostatic tuning in spectral detection through the integration of an innovative tuning structure and dual-channel filtering. Fabricated using wafer-level bulk micromachining techniques, the module enables continuous tuning and precise detection under a driving voltage of 0–40 V. The two channels cover spectral ranges of 814–946 nm and 968–1211 nm, respectively, achieving peak transmittance over 79% with full-width at half maximum (FWHM) values ranging from 7.59 to 43.29 nm, setting a new standard for performance in this spectral range. The results demonstrate the potential of MEMS-FPC as a high-performance spectral sensor, demonstrating its future application as a NIR microspectrometer when integrated with commercial CCDs. With its low power consumption and compact size, this module is well-suited for integration into portable devices such as smartphones and drones, offering real-time NIR spectral sensing capabilities.