Analysis of axial resistivity during SiC crystal growth by the PVT method

Abstract

Nitrogen doped n-type SiC substrates are extensively employed for high-power devices thanks to their excellent physical properties. However, the growth of SiC single crystals via the physical vapor transport method still faces large challenges including the control of temperature fields, regulation of the C/Si ratio at the growth front, and intra- and inter-substrate resistivity uniformity improvement. Numerical simulations have been performed to study the evolution of temperature, C/Si ratio and nitrogen incorporation at the growth front as a function of crystal length. Gas exchange across the crucible and crucible etching reaction were considered, and the effects on the crystal growth rate, temperature, C/Si ratio and N₂ distribution at the growth front were illustrated. The computational results show unprecedented agreement with experimental observations. The factors influencing crystal resistivity have been demonstrated. The nitrogen doping efficiency in 4H-SiC crystal growth through the PVT method has been proposed through computed and measured nitrogen concentrations.