{"title":"Oxygen-Vacancy-Rich SnO2 Nanoparticles Based Ultralow-Power MEMS Sensor for Nitrogen Dioxide Detection","authors":"Yong Yan, Xigui Lan, Yuzhou Li, Meihua Liang, Xiaodong Liu, Jiaxuan Yang, Rongrong Jia, Yuanyuan Ge, Zhili Li* and Lei Huang*, ","doi":"10.1021/acsanm.4c06932","DOIUrl":null,"url":null,"abstract":"<p >The development of highly sensitive and ultralow-power NO<sub>2</sub> sensors is crucial for real-time NO<sub>2</sub> monitoring. This study synthesizes tiny SnO<sub>2</sub> nanoparticles with enriched oxygen vacancies for use in microelectromechanical system (MEMS) gas sensors, enabling ppb-level NO<sub>2</sub> detection at reduced operating temperatures. PVP was used to adjust the particle size and surface oxygen vacancies in the hydrothermal method. The gas sensing performance shows that the 0.75 g PVP-SnO<sub>2</sub> exhibited the highest response of 14.7 to 500 ppb NO<sub>2</sub> at a low operating temperature of 102 °C, which is 3.2 times higher than that of the 0.00 g PVP-SnO<sub>2</sub> sensor under the same conditions. Compared to similar studies, this sensor achieved a high response value and ultralow power consumption of 8.4 mW. The improvement in performance is mainly attributed to N doping and the abundance of oxygen vacancies. This research presents a promising strategy for the development of high-performance, low-energy, real-time NO<sub>2</sub> gas sensors.</p>","PeriodicalId":6,"journal":{"name":"ACS Applied Nano Materials","volume":"8 14","pages":"6920–6929 6920–6929"},"PeriodicalIF":5.5000,"publicationDate":"2025-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"ACS Applied Nano Materials","FirstCategoryId":"88","ListUrlMain":"https://pubs.acs.org/doi/10.1021/acsanm.4c06932","RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 0
Abstract
The development of highly sensitive and ultralow-power NO2 sensors is crucial for real-time NO2 monitoring. This study synthesizes tiny SnO2 nanoparticles with enriched oxygen vacancies for use in microelectromechanical system (MEMS) gas sensors, enabling ppb-level NO2 detection at reduced operating temperatures. PVP was used to adjust the particle size and surface oxygen vacancies in the hydrothermal method. The gas sensing performance shows that the 0.75 g PVP-SnO2 exhibited the highest response of 14.7 to 500 ppb NO2 at a low operating temperature of 102 °C, which is 3.2 times higher than that of the 0.00 g PVP-SnO2 sensor under the same conditions. Compared to similar studies, this sensor achieved a high response value and ultralow power consumption of 8.4 mW. The improvement in performance is mainly attributed to N doping and the abundance of oxygen vacancies. This research presents a promising strategy for the development of high-performance, low-energy, real-time NO2 gas sensors.
研制高灵敏度、超低功耗的二氧化氮传感器是实现二氧化氮实时监测的关键。该研究合成了具有富氧空位的微小SnO2纳米颗粒，用于微机电系统（MEMS）气体传感器，在降低工作温度下实现ppb级NO2检测。在水热法中使用PVP调节颗粒大小和表面氧空位。气敏性能表明，在102℃的低温下，0.75 g PVP-SnO2的响应最高，为14.7 ~ 500 ppb NO2，是相同条件下0.00 g PVP-SnO2传感器的3.2倍。与同类研究相比，该传感器实现了高响应值和超低功耗8.4 mW。性能的提高主要归功于N的掺杂和氧空位的丰富。本研究为开发高性能、低能耗、实时NO2气体传感器提供了一个有前途的策略。
期刊介绍：
ACS Applied Nano Materials is an interdisciplinary journal publishing original research covering all aspects of engineering, chemistry, physics and biology relevant to applications of nanomaterials. The journal is devoted to reports of new and original experimental and theoretical research of an applied nature that integrate knowledge in the areas of materials, engineering, physics, bioscience, and chemistry into important applications of nanomaterials.
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