{"title":"Stress compensation by deposition of a nonuniform corrective coating.","authors":"J B Oliver, J Spaulding, B Charles","doi":"10.1364/AO.59.000A54","DOIUrl":null,"url":null,"abstract":"<p><p>Surface deformation by coating stress is compensated by prefiguring the substrate with a radially nonuniform layer of dense silica. Stresses in the compensation layer and reflector are modeled using finite element analysis to determine the optimal thickness profile, with the deposited coating reducing the surface deformation by 90%. This process is intended to allow implementation of both the compensation layer and the traditional multilayer coating in a single vacuum cycle.</p>","PeriodicalId":8092,"journal":{"name":"Applied optics","volume":"59 5","pages":"A54-A57"},"PeriodicalIF":1.7000,"publicationDate":"2020-02-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Applied optics","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1364/AO.59.000A54","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"OPTICS","Score":null,"Total":0}
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Abstract
Surface deformation by coating stress is compensated by prefiguring the substrate with a radially nonuniform layer of dense silica. Stresses in the compensation layer and reflector are modeled using finite element analysis to determine the optimal thickness profile, with the deposited coating reducing the surface deformation by 90%. This process is intended to allow implementation of both the compensation layer and the traditional multilayer coating in a single vacuum cycle.
期刊介绍：
A highly regarded, premium quality must read for everyone in the optics field that offers applications-centered research in optics, photonics, imaging, and sensing. Topics germane to the journal include optical technology, lasers, photonics, environmental optics, and information processing.
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