Curvature Dependent Electrostatic Field in the Deformable MEMS Device: Stability and Optimal Control

Abstract

Abstract The recovery of the membrane profile of an electrostatic micro-electro-mechanical system (MEMS) device is an important issue because, when applying an external voltage, the membrane deforms with the consequent risk of touching the upper plate of the device (a condition that should be avoided). Then, during the deformation of the membrane, it is useful to know if this movement admits stable equilibrium configurations. In such a context, our present work analyze the behavior of an electrostatic 1D membrane MEMS device when an external electric voltage is applied. In particular, starting from a well-known second-order elliptical semi-linear di erential model, obtained considering the electrostatic field inside the device proportional to the curvature of the membrane, the only possible equilibrium position is obtained, and its stability is analyzed. Moreover, considering that the membrane has an inertia in moving and taking into account that it must not touch the upper plate of the device, the range of possible values of the applied external voltage is obtained, which accounted for these two particular operating conditions. Finally, some calculations about the variation of potential energy have identified optimal control conditions.