Ines Hamann, J. Sanjuan, R. Spannagel, M. Gohlke, G. Wanner, S. Schuster, F. Guzmán, C. Braxmaier
{"title":"Laser-dilatometer calibration using a single-crystal silicon sample","authors":"Ines Hamann, J. Sanjuan, R. Spannagel, M. Gohlke, G. Wanner, S. Schuster, F. Guzmán, C. Braxmaier","doi":"10.1080/15599612.2019.1587117","DOIUrl":null,"url":null,"abstract":"Abstract Marginal changes in geometrical dimensions due to temperature changes affect the performance of optical instruments. Highly dimensionally stable materials can minimize these effects since they offer low coefficients of thermal expansion (CTE). Our dilatometer, based on heterodyne interferometry, is able to determine the CTE in range. Here, we present the improved interferometer performance using angular measurements via differential wavefront sensing to correct for tilt-to-length coupling. The setup was tested by measuring the CTE of a single-crystal silicon at 285 K. Results are in good agreement with the reported values and show a bias of less than 1%.","PeriodicalId":50296,"journal":{"name":"International Journal of Optomechatronics","volume":"13 1","pages":"18 - 29"},"PeriodicalIF":6.7000,"publicationDate":"2019-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1080/15599612.2019.1587117","citationCount":"5","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Journal of Optomechatronics","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1080/15599612.2019.1587117","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 5
Abstract
Abstract Marginal changes in geometrical dimensions due to temperature changes affect the performance of optical instruments. Highly dimensionally stable materials can minimize these effects since they offer low coefficients of thermal expansion (CTE). Our dilatometer, based on heterodyne interferometry, is able to determine the CTE in range. Here, we present the improved interferometer performance using angular measurements via differential wavefront sensing to correct for tilt-to-length coupling. The setup was tested by measuring the CTE of a single-crystal silicon at 285 K. Results are in good agreement with the reported values and show a bias of less than 1%.
期刊介绍：
International Journal of Optomechatronics publishes the latest results of multidisciplinary research at the crossroads between optics, mechanics, fluidics and electronics.
Topics you can submit include, but are not limited to:
-Adaptive optics-
Optomechanics-
Machine vision, tracking and control-
Image-based micro-/nano- manipulation-
Control engineering for optomechatronics-
Optical metrology-
Optical sensors and light-based actuators-
Optomechatronics for astronomy and space applications-
Optical-based inspection and fault diagnosis-
Micro-/nano- optomechanical systems (MOEMS)-
Optofluidics-
Optical assembly and packaging-
Optical and vision-based manufacturing, processes, monitoring, and control-
Optomechatronics systems in bio- and medical technologies (such as optical coherence tomography (OCT) systems or endoscopes and optical based medical instruments)
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