Tribological analysis of tip-cantilever made of SU-8, talc and PFPE composite

IF 1.6 Q4 MATERIALS SCIENCE, COATINGS & FILMS Tribology - Materials, Surfaces & Interfaces Pub Date : 2020-04-02 DOI:10.1080/17515831.2019.1675339
J. Katiyar, S. Sinha, T. Hirayama, Arvind Kumar
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引用次数: 3

Abstract

ABSTRACT SU-8 polymer with talc particle (30 wt-%) and liquid perfluoropolyether (PFPE) (30 wt-%) fillers was used as a composite to fabricate conical tip-cantilever device. The composite tip demonstrated lower coefficient of friction (∼0.22) when compared with a tip made of pure SU-8 (∼0.65). Fluorine was detected on the wear track and the tip surface, which resulted from the transfer of PFPE from the tip to the wear track. The counterface made of pure SU-8 remained smooth and unworn when slid against the composite tip even after 1000 cycles of sliding. This composite with improved tribological and mechanical properties can be used for fabricating small component devices such as for micro-electro-mechanical systems (MEMS).
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SU-8、滑石粉和PFPE复合材料尖端悬臂的摩擦学分析
摘要以滑石颗粒(30 wt-%)和液体全氟聚醚(PFPE) (30 wt-%)为填料的SU-8聚合物为复合材料,制备了锥形尖端悬臂装置。与纯SU-8制成的尖端(~ 0.65)相比,复合尖端的摩擦系数(~ 0.22)更低。在磨损轨迹和尖端表面检测到氟,这是由于PFPE从尖端转移到磨损轨迹造成的。即使经过1000次的滑动,纯SU-8制成的台面在滑动到复合尖端时仍保持光滑和未磨损。这种具有改进的摩擦学和机械性能的复合材料可用于制造小型元件器件,如微机电系统(MEMS)。
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来源期刊
Tribology - Materials, Surfaces & Interfaces
Tribology - Materials, Surfaces & Interfaces MATERIALS SCIENCE, COATINGS & FILMS-
CiteScore
2.80
自引率
0.00%
发文量
15
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