{"title":"Performance analysis of a MEMS cantilever beam","authors":"T. Gomathi, M. Shaby","doi":"10.4024/n08go21t.ntp.18.01","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":39996,"journal":{"name":"Nanotechnology Perceptions","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2022-04-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Nanotechnology Perceptions","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.4024/n08go21t.ntp.18.01","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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