The “LED‐version” of the electron gun

IF 0.4 Q4 ENGINEERING, MECHANICAL Vakuum in Forschung und Praxis Pub Date : 2023-06-01 DOI:10.1002/vipr.202300801
M. Bachmann, F. Düsberg, A. Pahlke, S. Edler, A. Schels, F. Herdl, M. Hausladen, P. Buchner, R. Schreiner
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引用次数: 0

Abstract

We report on our progress to develop and optimize electron sources for practical applications. A simple fabrication process is introduced based on a wafer dicing saw and a wet chemical etch step without the need for a clean room. Due to the formation of crystal facets the samples show a homogeneous geometry throughout the array. Characterization techniques are developed to systematically compare various arrays. A very defined measurement procedure based on current controlled IV‐sweeps as well as lifetime measurements at various currents is proposed. To investigate the current distribution in the array a commercial CMOS detector is used and shows the potential for in depth analysis of the arrays. Finally, a compact hermetically sealed housing is presented enabling electron generation in atmospheric pressure environments.
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电子枪的“LED版本”
我们报告了我们为实际应用开发和优化电子源的进展。介绍了一种基于晶片划片锯和湿法化学蚀刻步骤的简单制造工艺,而不需要清洁室。由于晶面的形成,样品在整个阵列中显示出均匀的几何形状。开发了表征技术来系统地比较各种阵列。提出了一种基于电流控制IV扫描以及各种电流下的寿命测量的非常明确的测量程序。为了研究阵列中的电流分布,使用了商用CMOS检测器,并显示了对阵列进行深度分析的潜力。最后,提出了一种紧凑的密封外壳,能够在大气压环境中产生电子。
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来源期刊
Vakuum in Forschung und Praxis
Vakuum in Forschung und Praxis ENGINEERING, MECHANICAL-
CiteScore
0.30
自引率
0.00%
发文量
84
期刊介绍: VIP – Vakuum in Forschung und Praxis - Zeitschrift für Vakuumtechnologie, Oberflächen und Dünne Schichten ist die einzige Zeitschrift für alle Bereiche der Vakuumtechnologie und Dünnschichttechnik, die sich als Brücke und Bindeglied zwischen Wissenschaftlern, Praktikern und Anwendern aus Forschung, Entwicklung und Produktion versteht. Sie berichtet und informiert über neueste Entwicklungen und Erkenntnisse. VIP – Vakuum in Forschung und Praxis veröffentlicht u.a. - Übersichtsartikel - Fachaufsätze - referierte Beiträge aus der Forschung - Anwenderberichte - Produktinformationen - Interviews - Buchbesprechungen und -hinweise - Produkt- und Lieferantenverzeichnis
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News: Vakuum in Forschung und Praxis 2/2024 Vakuum – im Team der Geheimnislüfter Inhalt: Vakuum in Forschung und Praxis 2/2024 Bezugsquellen: Vakuum in Forschung und Praxis 2/2024 Empowering PVD for corrosion protection
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