A. Pahlke, S. Edler, A. Schels, F. Herdl, P. Buchner
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Abstract
The “LED-version” of the electron gun An electron source for operation in ambient pressure environments based on silicon field emitter arrays M. Bachmann, F. Düsberg, A. Pahlke, S. Edler, A. Schels, F. Herdl, M. Hausladen, P. Buchner, and R. Schreiner Higher emission density, faster switching, lower power consumption and a reduced thermal load are only a few of the advantages that field emission (FE) based electron sources offer compared to thermionic cathodes. Many applications await field emitter arrays (FEA) acting as electron guns, once their manufacturing process succeeds simply and reliable methods for comparability and evaluation of different field emitter types are established. An easy fabrication scheme for FEAs and an universal performance test are presented here.
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