In-situ pitting corrosion detection using high-frequency T(0,1) guided wave mode in gas distribution tubes at operating temperatures

Aditya Chilukuri, N. Raja, K. Balasubramaniam
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引用次数: 2

Abstract

ABSTRACT The use of guided ultrasonic waves has been identified as a promising technology for continuous monitoring of pipes and tubes for the detection of corrosion damage defects of cross-sectional area ratio less than 5%, particularly in the process industry applications. Here, we present an approach to use torsional guided wave mode T(0,1) generated using leave-in-place magnetostriction patch sensors for the health monitoring of thin and small diameter stainless steel tubes operating at elevated temperatures in the range of 150°C. These tubes are used in the transportation of gas in the Silicon wafer manufacturing semiconductor industries. The detection of small pitting defects is demonstrated using both numerical and experimental approach. The phenomenon of scattering of the high frequency fundamental torsional guided wave mode T(0,1) from small pitting type defects in thin and small diameter tubes is closely examined, and its excitation parameters are selected using finite element (FE) simulations. The sensitivity of the reflected signal from defects as low as 2% of the cross-sectional area ratio was feasible even at high temperature. This work is of great interest to many processes in semiconductor manufacturing.
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在工作温度下,使用高频T(0,1)导波模式对气体分配管中的点蚀进行原位检测
导流超声波已被确定为一种有前途的技术,用于连续监测管道和管道的腐蚀损伤缺陷的检测,其截面积比小于5%,特别是在过程工业应用中。在这里,我们提出了一种使用原地磁致伸缩贴片传感器产生的扭转导波模式T(0,1)的方法,用于在150°C范围内高温下工作的薄和小直径不锈钢管的健康监测。这些管子用于硅晶圆制造半导体工业的气体输送。采用数值和实验两种方法验证了小点蚀缺陷的检测方法。研究了小直径薄管小点蚀型缺陷中高频基波扭转导波模式T(0,1)的散射现象,并采用有限元模拟方法选择了其激励参数。即使在高温下,缺陷反射信号的灵敏度低至截面积比的2%也是可行的。这项工作对半导体制造中的许多过程都有很大的兴趣。
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来源期刊
CiteScore
3.90
自引率
9.50%
发文量
24
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