{"title":"A simple way to predict the flip–chip gap","authors":"Yue Huang, Zhi-Kai Gan, Chun Lin","doi":"10.1088/1361-6439/aceb00","DOIUrl":null,"url":null,"abstract":"Using laser scanning confocal microscopy measurement, a concise method for extracting the indium bump shape in microelectronics was first established. The extracted bump shape was then used as the input for finite element analysis. The modeled one-bump deformation was used to predict the final flip–chip gap after bonding. Dovetailed with the results of cross-sectional scanning electron microscopy, this simple and non-destructive method for predicting a flip–chip gap of the order of 10 microns or less was eventually validated.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":" ","pages":""},"PeriodicalIF":2.4000,"publicationDate":"2023-07-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Micromechanics and Microengineering","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1088/1361-6439/aceb00","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
Abstract
Using laser scanning confocal microscopy measurement, a concise method for extracting the indium bump shape in microelectronics was first established. The extracted bump shape was then used as the input for finite element analysis. The modeled one-bump deformation was used to predict the final flip–chip gap after bonding. Dovetailed with the results of cross-sectional scanning electron microscopy, this simple and non-destructive method for predicting a flip–chip gap of the order of 10 microns or less was eventually validated.
期刊介绍：
Journal of Micromechanics and Microengineering (JMM) primarily covers experimental work, however relevant modelling papers are considered where supported by experimental data.
The journal is focussed on all aspects of:
-nano- and micro- mechanical systems
-nano- and micro- electomechanical systems
-nano- and micro- electrical and mechatronic systems
-nano- and micro- engineering
-nano- and micro- scale science
Please note that we do not publish materials papers with no obvious application or link to nano- or micro-engineering.
Below are some examples of the topics that are included within the scope of the journal:
-MEMS and NEMS:
Including sensors, optical MEMS/NEMS, RF MEMS/NEMS, etc.
-Fabrication techniques and manufacturing:
Including micromachining, etching, lithography, deposition, patterning, self-assembly, 3d printing, inkjet printing.
-Packaging and Integration technologies.
-Materials, testing, and reliability.
-Micro- and nano-fluidics:
Including optofluidics, acoustofluidics, droplets, microreactors, organ-on-a-chip.
-Lab-on-a-chip and micro- and nano-total analysis systems.
-Biomedical systems and devices:
Including bio MEMS, biosensors, assays, organ-on-a-chip, drug delivery, cells, biointerfaces.
-Energy and power:
Including power MEMS/NEMS, energy harvesters, actuators, microbatteries.
-Electronics:
Including flexible electronics, wearable electronics, interface electronics.
-Optical systems.
-Robotics.
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