Attenuation characteristics of electromagnetic wave in inductive coupled plasma based on variation of discharge power

Q4 Engineering 强激光与粒子束 Pub Date : 2021-03-15 DOI:10.11884/HPLPB202133.200320

Lin Mao, Xu Haojun, Wei Xiaolong, Han Xinmin, Chang Yipeng, Lin Min

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Abstract

The application of Inductively Coupled Plasma (ICP) can cause a wide range high density plasma and has great advantages in electromagnetic wave attenuation. Studying the process of interaction between ICP and electromagnetic wave, we established the electromagnetic wave propagation in inhomogeneous plasma, adopted hierarchical model for the diagnosis of the interaction of plasma and electromagnetic wave, and studied the electromagnetic wave attenuation under different conditions of input power. The experiment method of inductively coupled plasma for attenuation electromagnetic wave was proposed. Based on the model of plasma covering over the metal plate, the arch system for measurement of microwave reflectivity of plasma was established. The interaction of closed-plasma and electromagnetic wave with a bandwidth of 4−8 GHz was studied, the effect on microwave reflection of different rf power was evaluated analyzed, and the experimental measurement and calculation results were analyzed. The experimental results show that the inductively coupled plasma attenuates the electromagnetic wave in 5.92−6.8 GHz band obviously by power regulation.

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基于放电功率变化的电感耦合等离子体中电磁波的衰减特性

电感耦合等离子体（ICP）的应用可以产生宽范围的高密度等离子体，在电磁波衰减方面具有很大的优势。研究了ICP与电磁波相互作用的过程，建立了电磁波在非均匀等离子体中的传播，采用层次模型对等离子体与电磁波的相互作用进行了诊断，并研究了不同输入功率条件下电磁波的衰减。提出了电感耦合等离子体衰减电磁波的实验方法。基于等离子体覆盖金属板的模型，建立了测量等离子体微波反射率的拱形系统。研究了闭合等离子体与带宽为4−8GHz的电磁波的相互作用，分析了不同射频功率对微波反射的影响，并对实验测量和计算结果进行了分析。实验结果表明，电感耦合等离子体通过功率调节对5.92−6.8GHz频段的电磁波有明显的衰减作用。

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