{"title":"Control of subthreshold swing using an in situ PEALD nano-laminated IGZO/Al2O3 multi-channel structured TFT","authors":"Won-Bum Lee, Yoon‐Seo Kim, Jin-Seong Park","doi":"10.1080/15980316.2023.2249244","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":16257,"journal":{"name":"Journal of Information Display","volume":" ","pages":""},"PeriodicalIF":3.7000,"publicationDate":"2023-08-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Information Display","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1080/15980316.2023.2249244","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
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