Features of the Formation of Ni–GaAs Contacts Obtained by Electrolysis and Their Electrophysical Properties

IF 1.1 4区 物理与天体物理 Q4 PHYSICS, APPLIED Technical Physics Pub Date : 2023-06-10 DOI:10.1134/S1063784223010036
V. V. Filippov, S. E. Luzyanin, K. A. Bogonosov
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Abstract

Nickel contacts based on gallium arsenide are of interest from the point of view of their application in optoelectronics. The aim of this work is to study the contact structures of Ni–p-GaAs and Ni–n-GaAs. The object of study is the electrochemical contacts of nickel to crystalline gallium arsenide. The article presents studies of the topography of homogeneous electrochemical nickel films of nanometer thickness (50–100 nm) on the surface of a semiconductor. The current–voltage characteristics of metal–semiconductor contacts are experimentally obtained. The roughness of the GaAs substrate of the Ni film was studied using optical and probe microscopes. Nickel films were obtained using a Watts solution and a setup for the production of electrochemical structures by the drop method. To minimize the roughness of the nickel surface obtained by electrolysis, a mode of low current density is used. Using a theoretical model and experimental data, the contact resistances are calculated and their current–voltage characteristics are obtained. The parameters of nickel surface roughness, which affect the operational properties of contact structures, are determined. The features of the current flow through the electrochemically obtained Ni–GaAs contacts are revealed. It is shown that the resulting Ni–p-GaAs structures are Ohmic, and the current–voltage characteristics of the Ni–n-GaAs contacts have a nonlinear region at voltages less than 1.5 V. It is shown that the formation of an integral nickel film on the GaAs surface is possible when the Ni layer thickness exceeds the average substrate roughness.

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电解制备Ni-GaAs触点的形成特征及其电物理性质
基于砷化镓的镍触点在光电子学中的应用备受关注。本工作的目的是研究Ni-p-GaAs和Ni-n-GaAs的接触结构。研究的对象是镍与结晶砷化镓的电化学接触。本文研究了半导体表面纳米厚度(50 - 100nm)的均匀电化学镍膜的形貌。实验得到了金属-半导体触点的电流-电压特性。利用光学显微镜和探针显微镜研究了Ni薄膜GaAs衬底的粗糙度。采用瓦茨溶液制备镍膜,并建立了用滴法制备电化学结构的装置。为了尽量减少电解镍表面的粗糙度,采用了低电流密度模式。利用理论模型和实验数据,计算了接触电阻,得到了接触电阻的电流-电压特性。确定了影响接触结构使用性能的镍表面粗糙度参数。揭示了通过电化学得到的Ni-GaAs触点的电流流动特征。结果表明,所得的Ni-p-GaAs结构为欧姆结构,且在电压小于1.5 V时,Ni-n-GaAs触点的电流-电压特性存在非线性区域。结果表明,当Ni层厚度超过衬底平均粗糙度时,可以在GaAs表面形成完整的镍膜。
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来源期刊
Technical Physics
Technical Physics 物理-物理:应用
CiteScore
1.30
自引率
14.30%
发文量
139
审稿时长
3-6 weeks
期刊介绍: Technical Physics is a journal that contains practical information on all aspects of applied physics, especially instrumentation and measurement techniques. Particular emphasis is put on plasma physics and related fields such as studies of charged particles in electromagnetic fields, synchrotron radiation, electron and ion beams, gas lasers and discharges. Other journal topics are the properties of condensed matter, including semiconductors, superconductors, gases, liquids, and different materials.
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