Effects of rolled fibrous microstructure on fatigue properties of extruded Cu-5Al planar micro springs

IF 2.4 4区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Journal of Micromechanics and Microengineering Pub Date : 2023-08-17 DOI:10.1088/1361-6439/acf13a
Feiyin Li, Xiubing Wang, Shaojie Ma, X. Dong, Xinping Zhang
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Abstract

Planar micro spring is an important elastic component in microelectromechanical system devices, and one of its main failures is fatigue. In this work, a new method to improve the cycles of a planar micro spring by introducing pre-rolled fibrous microstructure was proposed. Cu-5Al alloy billets with a fibrous microstructure rolled at room temperature with a reduction ratio of 70% were obtained. Three types of planar micro springs with fibrous microstructure were prepared through extrusion by varying the angle between the fibrous microstructure direction and the extrusion direction. Fatigue tests were conducted using a customized micro-fatigue test system. The best fatigue performance was obtained by preparing the micro springs with the fibrous microstructure direction perpendicular to the extrusion direction, while the worst fatigue performance was obtained by preparing the planar micro springs with the fibrous microstructure direction parallel to the extrusion direction. The fibrous microstructure direction affected the local strain in the micro springs. The fibrous microstructure slightly affected the location of the crack initiation region but significantly affected the area of crack initiation and steady-state expansion region of the micro spring. The fatigue life cycle of extruded Cu-5Al alloy planar micro spring with the pre-rolled fibrous microstructure improved by 58% more than that of extruded Cu-7Al alloy planar micro spring without the pre-rolled fibrous microstructure. Micro spring fatigue life cycle decreased with increasing strain amplitude. This work provides a new approach for preparing planar micro springs with high fatigue performance.
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轧制纤维组织对挤压Cu-5Al平面微弹簧疲劳性能的影响
平面微弹簧是微机电系统器件中的一个重要弹性部件,其主要失效之一是疲劳。本文提出了一种通过引入预轧纤维微观结构来提高平面微弹簧循环次数的新方法。获得了在室温下以70%的还原率轧制的具有纤维状组织的Cu-5Al合金坯料。通过改变纤维微观结构方向与挤压方向之间的角度,通过挤压制备了三种具有纤维微观结构的平面微弹簧。使用定制的微疲劳测试系统进行疲劳测试。通过制备纤维微观结构方向垂直于挤压方向的微弹簧获得最佳疲劳性能,而通过制备平面微弹簧获得最差疲劳性能,纤维微观组织方向平行于挤压方向。纤维微观结构的方向影响微弹簧的局部应变。纤维微结构对微弹簧的裂纹萌生区位置影响较小,但对微弹簧裂纹萌生区和稳态扩展区的面积影响较大。具有预轧纤维组织的挤压Cu-5Al合金平面微弹簧的疲劳寿命比没有预轧纤维结构的挤压Cu-7Al合金平面微观弹簧提高了58%。微弹簧疲劳寿命随着应变幅度的增大而减小。这项工作为制备具有高疲劳性能的平面微弹簧提供了一种新的方法。
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来源期刊
Journal of Micromechanics and Microengineering
Journal of Micromechanics and Microengineering 工程技术-材料科学:综合
CiteScore
4.50
自引率
4.30%
发文量
136
审稿时长
2.8 months
期刊介绍: Journal of Micromechanics and Microengineering (JMM) primarily covers experimental work, however relevant modelling papers are considered where supported by experimental data. The journal is focussed on all aspects of: -nano- and micro- mechanical systems -nano- and micro- electomechanical systems -nano- and micro- electrical and mechatronic systems -nano- and micro- engineering -nano- and micro- scale science Please note that we do not publish materials papers with no obvious application or link to nano- or micro-engineering. Below are some examples of the topics that are included within the scope of the journal: -MEMS and NEMS: Including sensors, optical MEMS/NEMS, RF MEMS/NEMS, etc. -Fabrication techniques and manufacturing: Including micromachining, etching, lithography, deposition, patterning, self-assembly, 3d printing, inkjet printing. -Packaging and Integration technologies. -Materials, testing, and reliability. -Micro- and nano-fluidics: Including optofluidics, acoustofluidics, droplets, microreactors, organ-on-a-chip. -Lab-on-a-chip and micro- and nano-total analysis systems. -Biomedical systems and devices: Including bio MEMS, biosensors, assays, organ-on-a-chip, drug delivery, cells, biointerfaces. -Energy and power: Including power MEMS/NEMS, energy harvesters, actuators, microbatteries. -Electronics: Including flexible electronics, wearable electronics, interface electronics. -Optical systems. -Robotics.
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